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ECR Plasma in Growth of Cubic GaN by Low Pressure MOCVD

✍ Scribed by Biao Gu; Yin Xu; Fu Wen Qin; San Sheng Wang; Yu Sui; Zhan Guo Wang

Book ID: 110317746
Publisher: Springer
Year: 2002
Tongue: English
Weight: 453 KB
Volume: 22
Category: Article
ISSN: 0272-4324
DOI: 10.1023/a:1012948816883

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