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Dwell-time dependence of the defect accumulation in focused ion beam synthesis of CoSi2

✍ Scribed by Lothar Bischoff; Stephan Hausmann; Matthias Voelskow; Jochen Teichert

Book ID: 114170513
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 342 KB
Volume: 147
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00533-3

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