✦ LIBER ✦
Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon
✍ Scribed by Hopman, Wico C L; Ay, Feridun; Hu, Wenbin; Gadgil, Vishwas J; Kuipers, Laurens; Pollnau, Markus; Ridder, René M de
- Book ID
- 121468598
- Publisher
- Institute of Physics
- Year
- 2007
- Tongue
- English
- Weight
- 1006 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0957-4484
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