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Dual-mode plasma-enhanced chemical vapor deposition (PECVD) of polymer-like a-C:H films: vibrational and optical properties

✍ Scribed by J.E. Bourée; C. Godet; R. Etemadi; B. Drévillon


Book ID
116136795
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
443 KB
Volume
76
Category
Article
ISSN
0379-6779

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