✦ LIBER ✦

Photoconductivity and optical stability of intrinsic μc-Si films formed by remote plasma-enhanced chemical-vapor deposition, remote pecvd

✍ Scribed by M.J. Williams; C. Wang; G. Lucovsky

Book ID: 117147100
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 302 KB
Volume: 137-138
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(05)80226-1

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deposition of μc-Si and μc-SiC thin fil

Deposition of μc-Si and μc-SiC thin films by remote plasma-enhanced chemical-vapor deposition

✍ G. Lucovsky; Cheng Wang; R.J. Nemanich; M.J. Williams 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 995 KB

Optical and electrical properties of a-S

Optical and electrical properties of a-Si:H films grown by remote plasma enhanced chemical vapor deposition (RPECVD)

✍ G.N. Parsons; D.V. Tsu; G. Lucovsky 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 189 KB

In situ P-doped Si and Si1−xGexepitaxial

In situ P-doped Si and Si1−xGexepitaxial films grown by remote plasma enhanced chemical vapor deposition

✍ S. Thomas; J. Fretwell; D. Kinosky; R. Qian; A. Mahajan; P. Munguía; S. Banerjee 📂 Article 📅 1995 🏛 Springer US 🌐 English ⚖ 622 KB

Deposition and characterization of amorp

Deposition and characterization of amorphous and micro-crystalline Si,C alloy thin films by a remote plasma-enhanced chemical-vapor deposition process - RPECVD

✍ C. Wang; G. Lucovsky; R.J. Nemanich 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 410 KB

In situB-doped Si epitaxial films grown

In situB-doped Si epitaxial films grown at 450‡ C by remote plasma-enhanced chemical vapor deposition: Physical and electrical characterization

✍ J. Irby; D. Kinosky; T. Hsu; R. Qian; A. Mahajan; S. Thomas; B. Anthony; S. Bane 📂 Article 📅 1992 🏛 Springer US 🌐 English ⚖ 809 KB

Optical Properties of Wurtzite Zn 1- x C

Optical Properties of Wurtzite Zn 1- x Cd x O Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor Deposition

✍ Ohashi, Toshiya; Yamamoto, Kenji; Nakamura, Atsushi; Aoki, Toru; Temmyo, Jiro 📂 Article 📅 2007 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 275 KB