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Dry etching of MgCaO gate dielectric and passivation layers on GaN

✍ Scribed by M. Hlad; L. Voss; B.P. Gila; C.R. Abernathy; S.J. Pearton; F. Ren

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 355 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.10.018

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