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Influence of etching condition on surface morphology of AlN and GaN layers

✍ Scribed by Kuwano, N. ;Tajima, R. ;Bohyama, S. ;Miyake, H. ;Hiramatsu, K. ;Shibata, T.

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 479 KB
Volume: 201
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200404984

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