✦ LIBER ✦

Dry etching of low-temperature chemically vapour deposited phosphosilicate glass films in CF4-Q2plasma

✍ Scribed by R. Bantoiu; C. Pavelescu; V. Avramescu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A study of the properties of low tempera

✍ C. Pavelescu; C. Cobianu; N. Vlahovici; C. Ghita 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 109 KB

Measurement of phosphorus concentration

✍ A. Chȩcielewska; K. Pruszkowski 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 291 KB

Etch rate behaviour of phosphosilicate g

✍ C. Pavelescu; C. Cobianu 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 722 KB

1 MHz dielectric constants of phosphosil

✍ C. Pavelescu; D. Serghi 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 551 KB

Etch rate of low-temperature chemically

✍ C. Pavelescu; C. Cobianu; E. Segal 📂 Article 📅 1985 🏛 Springer 🌐 English ⚖ 154 KB

Etch rate behaviour of SiO2 films chemic

✍ Irina Kleps; Cristian Pavelescu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 220 KB