Measurement of phosphorus concentration profiles in chemically vapour-deposited phosphosilicate glass by precision etching

✍ Scribed by A. Chȩcielewska; K. Pruszkowski

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 291 KB
• Volume: 69
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(80)90583-0