✦ LIBER ✦

A study of the properties of low temperature chemically vapour deposited phosphosilicate glass films

✍ Scribed by C. Pavelescu; C. Cobianu; N. Vlahovici; C. Ghita

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

D.c. dielectric breakdown in phosphosili

✍ Daniel Serghi; Cristian Pavelescu 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 193 KB

Etch rate behaviour of phosphosilicate g

✍ C. Pavelescu; C. Cobianu 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 722 KB

IR spectra and etch rates of plasma-enha

✍ Z.I. Alexieva; M.A. Tzoneva; D.A. Dichkov 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 347 KB

Measurement of phosphorus concentration

✍ A. Chȩcielewska; K. Pruszkowski 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 291 KB

Low temperature deposition of hexagonal

✍ Seiji Motojima; Yoshihiro Tamura; Kohzo Sugiyama 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 388 KB

Silane oxidation study: Analysis of data

✍ C. Cobianu; C. Pavelescu 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 296 KB