1 MHz dielectric constants of phosphosilicate glass films chemically vapour-deposited in the SiH4-PH3-O2-N2system at low temperature

✍ Scribed by C. Pavelescu; D. Serghi

• Publisher: Springer
• Year: 1992
• Tongue: English
• Weight: 551 KB
• Volume: 27
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00540681