✦ LIBER ✦

Doping of silicon by pulsed electron beam annealing of deposited layers

✍ Scribed by M. Mäenpää; S.S. Lau; M. Von Allmen; I. Golecki; M.-A. Nicolet; J. Minnucci

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermal model of pulsed electron beam an

✍ G. Chemisky; D. Barbier; A. Laugier 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 522 KB

Scanning electron beam annealing of sput

✍ M. Cervera; A. Climent-Font; J. Garrido; J. Martínez; J. Perrière 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 543 KB

Pulsed electron-beam annealing of high-d

✍ A. Turos; J. Geerk 📂 Article 📅 1980 🏛 Springer 🌐 English ⚖ 253 KB

”Reverse” annealing mechanism in ion-dop

✍ R. Gretchel; V. A. Kagadei; N. I. Lebedeva; D. I. Proskurovskii; E. B. Yankelevi 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 460 KB

High speed scanning electron beam anneal

✍ S. Schiller; S. Panzer; R. Klabes 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Annealing of In implanted germanium by p

✍ A. Laugier; D. Barbier; A. Cachard 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 295 KB