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High speed scanning electron beam annealing of ion-implanted silicon layers

✍ Scribed by S. Schiller; S. Panzer; R. Klabes

Book ID: 107862814
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 318 KB
Volume: 73
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(80)90354-5

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