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Do oxygen molecules contribute to oxygen diffusion and thermal donor formation in silicon?

✍ Scribed by U. Gösele; K. -Y. Ahn; B. P. R. Marioton; T. Y. Tan; S. -T. Lee

Publisher
Springer
Year
1989
Tongue
English
Weight
894 KB
Volume
48
Category
Article
ISSN
1432-0630

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