Oxygen agglomeration and formation of ox
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V. V. Emtsev Jr.; C. A. J. Ammerlaan; V. V. Emtsev; G. A. Oganesyan; A. Misiuk;
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Article
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2003
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John Wiley and Sons
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English
β 114 KB
## Abstract The characteristic features of production processes of thermal donors in Czochralski grown silicon heat treated at __T__=450Β°C under hydrostatic pressures of about 1 GPa are studied. Two families of oxygenβrelated donors are formed under compressive stress. The first one is the wellβkno