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Enhanced thermal donor formation and oxygen diffusion in silicon exposed to a hydrogen plasma

✍ Scribed by R. Murray; A.R. Brown; R.C. Newman

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Enhanced formation of oxygen-related the

✍ N.M. Kazuchits; V.V. Litvinov; L.I. Murin; V.A. Martinovich 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 152 KB