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DLTS study of bonded interface in silicon-on-insulator structures annealed in hydrogen atmosphere

โœ Scribed by I.V. Antonova; J. Stano; O.V. Naumova; V.P. Popov; V.A. Skuratov

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
155 KB
Volume
66
Category
Article
ISSN
0167-9317

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