✦ LIBER ✦
Study of n- and p-type dopants activation and dopants behavior with respect to annealing conditions in silicon germanium-on-insulator (SGOI)
✍ Scribed by J. Bhandari; M. Vinet; T. Poiroux; B. Previtali; B. Vincent; L. Hutin; J.P. Barnes; S. Deleonibus; A.M. Ionescu
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 682 KB
- Volume
- 154-155
- Category
- Article
- ISSN
- 0921-5107
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