Effects of hydrogen chloride on the annealing kinetics of interface and oxide traps in oxidized silicon stressed by avalanche electron injection

✍ Scribed by Wallace Wan-Li Lin; Chih-Tang Sah

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 599 KB
• Volume: 31
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(88)90274-2