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Direct observation of surface dangling bonds during plasma process: chemical reactions during H2 and Ar plasma treatments

โœ Scribed by Satoshi Yamasaki; Ujjwal K. Das; Kenji Ishikawa


Book ID
108388368
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
185 KB
Volume
407
Category
Article
ISSN
0040-6090

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