✦ LIBER ✦
Real time observations of surface reactions during a-Si:H deposition or H2 plasma annealing by using FT-IR-ATR
✍ Scribed by Y. Miyoshi; Y. Yoshida; S. Miyazaki; M. Hirose
- Book ID
- 115991061
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 303 KB
- Volume
- 198-200
- Category
- Article
- ISSN
- 0022-3093
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