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Direct imaging of boron segregation to extended defects in silicon

✍ Scribed by Duguay, S.; Philippe, T.; Cristiano, F.; Blavette, D.

Book ID: 118066083
Publisher: American Institute of Physics
Year: 2010
Tongue: English
Weight: 896 KB
Volume: 97
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3526376

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