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Direct growth of GaN on off-oriented SiC (0001) by molecular-beam epitaxy for GaN/SiC heterojunction bipolar transistor

โœ Scribed by Y. Nakano; J. Suda; T. Kimoto


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
143 KB
Volume
2
Category
Article
ISSN
1862-6351

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Growth of GaN on SiC(0001) by Molecular
โœ Lee, C.D. ;Sagar, Ashutosh ;Feenstra, R.M. ;Sarney, W.L. ;Salamanca-Riba, L. ;Hs ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 188 KB ๐Ÿ‘ 1 views

GaN films are grown by plasma-assisted molecular beam epitaxy on 6H-SiC(0001) substrates. Suitable substrate preparation and growth conditions are found which greatly improve the structural quality of the films. Threading dislocation densities of about 1 ร‚ 10 9 cm --2 for edge dislocations and 1 ร‚ 1