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Dimensional etching of silicon and silicon dioxide in a localized gas discharge

✍ Scribed by A. V. Abramov, E. A. Abramova, I. S. Surovtsev

Book ID: 120810884
Publisher: Springer
Year: 2005
Tongue: English
Weight: 288 KB
Volume: 50
Category: Article
ISSN: 1063-7842
DOI: 10.1134/1.1994969

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