✦ LIBER ✦
Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges
✍ Scribed by A. P. Palov; Yu. A. Mankelevich; T. V. Rakhimova; D. Shamiryan
- Book ID
- 111443254
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2010
- Tongue
- English
- Weight
- 351 KB
- Volume
- 36
- Category
- Article
- ISSN
- 1063-780X
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