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Diffusion of ion-implanted phosphorus in silicon

✍ Scribed by Chelyadinskii, A. R. ;Taher, H. I. Haki

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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Concentration profiles of implanted phos

✍ Burkhardt, F. ;Mertens, A. ;Wagner, C. 📂 Article 📅 1974 🏛 John Wiley and Sons 🌐 English ⚖ 140 KB