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Diffusion models of BF2+ and B+ implanted at low-energy in crystalline silicon

โœ Scribed by J. Marcon; L. Ihaddadene-Le Coq; K. Masmoudi; K. Ketata


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
145 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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