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Dielectric property and thermal stability of HfO[sub 2] on silicon

✍ Scribed by Y. Lin; R. Puthenkovilakam; J. P. Chang

Book ID: 126064370
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 243 KB
Volume: 81
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1506207

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