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Effects of nitrogen atom doping on optical properties and dielectric constant of HfO[sub 2] gate oxides

✍ Scribed by Wang, X. J.; Zhang, L. D.; Zhang, J. P.; Liu, M.; He, G.


Book ID
120351311
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
557 KB
Volume
92
Category
Article
ISSN
0003-6951

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