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Dielectric characteristics of Al[sub 2]O[sub 3]–HfO[sub 2] nanolaminates on Si(100)

✍ Scribed by Cho, M.-H.; Roh, Y. S.; Whang, C. N.; Jeong, K.; Choi, H. J.; Nam, S. W.; Ko, D.-H.; Lee, J. H.; Lee, N. I.; Fujihara, K.

Book ID: 127300288
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 406 KB
Volume: 81
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1499223

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