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Dielectric function of sputter-deposited silicon dioxide and silicon nitride films in the thermal infrared

โœ Scribed by Eriksson, T. S. ;Jiang, S. ;Granqvist, C. G.


Book ID
115333484
Publisher
The Optical Society
Year
1985
Tongue
English
Weight
378 KB
Volume
24
Category
Article
ISSN
1559-128X

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