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Development of Reactive-Ion Etching for ZnO-Based Nanodevices

✍ Scribed by Lee, Kin Kiong; Luo, Yi; Lu, Xiaofeng; Bao, Peng; Song, Aimin M.

Book ID: 127349714
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 488 KB
Volume: 10
Category: Article
ISSN: 1536-125X
DOI: 10.1109/tnano.2010.2085013

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