✦ LIBER ✦
SiCl4-based reactive ion etching of ZnO and MgxZn1−xO films on r-sapphire substrates
✍ Scribed by J. Zhu; G. Saraf; J. Zhong; H. F. Sheng; B. V. Yakshinskiy; Y. Lu
- Book ID
- 107453769
- Publisher
- Springer US
- Year
- 2006
- Tongue
- English
- Weight
- 206 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0361-5235
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