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Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

✍ Scribed by Pristinski, Denis; Kozlovskaya, Veronika; Sukhishvili, Svetlana A.


Book ID
115390690
Publisher
Optical Society of America
Year
2006
Tongue
English
Weight
191 KB
Volume
23
Category
Article
ISSN
1084-7529

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