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Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films

✍ Scribed by Guo, Shuwen ;Gustafsson, Göran ;Hagel, Olle Jonny ;Arwin, Hans


Book ID
115344990
Publisher
The Optical Society
Year
1996
Tongue
English
Weight
231 KB
Volume
35
Category
Article
ISSN
1559-128X

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