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Ellipsometry measurement of the complex refractive index and thickness of polysilicon thin films

✍ Scribed by Ho, Jau Hwang; Len Lee, Chung; Lei, Tan Fu; Chao, Tien Sheng


Book ID
115386775
Publisher
Optical Society of America
Year
1990
Tongue
English
Weight
1006 KB
Volume
7
Category
Article
ISSN
1084-7529

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