✦ LIBER ✦

Determination of the thickness and refractive index of films on silicon using split-beam ellipsometry

✍ Scribed by Neville V. Smith; Yoshio Komiya; Robert H. Weissman

Book ID: 107855866
Publisher: Elsevier Science
Year: 1969
Tongue: English
Weight: 775 KB
Volume: 12
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(69)90054-9

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Determination of the thickness and refra

Determination of the thickness and refractive index of films on silicon using split-beam ellipsometry : N. V. Smith, Y. Komiya and R. H. Weissman, Solid-St. Electron. 12 (1969), p. 765

📂 Article 📅 1970 🏛 Elsevier Science 🌐 English ⚖ 105 KB

Determination of film thickness and refr

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

✍ Pristinski, Denis; Kozlovskaya, Veronika; Sukhishvili, Svetlana A. 📂 Article 📅 2006 🏛 Optical Society of America 🌐 English ⚖ 191 KB

On the Calculation of Thin Film Refracti

On the Calculation of Thin Film Refractive Index and Thickness by Ellipsometry

✍ Holmes, D. A. 📂 Article 📅 1967 🏛 The Optical Society 🌐 English ⚖ 617 KB

Simultaneous and Independent Determinati

Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry

✍ VEDAM, K.; RAI, R.; LUKES, F.; SRINIVASAN, R. 📂 Article 📅 1968 🏛 Optical Society of America ⚖ 771 KB

Determination of thickness and refractiv

Determination of thickness and refractive index of SiO2 films on silicon wafers using an Abbe refractometer

✍ W. Lukosz; P. Pliska 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 263 KB

Refractive index and thickness determina

Refractive index and thickness determination of thin-films using Lloyd’s interferometer

✍ A.A. Hamza; M.A. Mabrouk; W.A. Ramadan; A.M. Emara 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 326 KB

Determination of the refractive index and the thickness of thin-films using light interference have been presented. This has been done, for the first time, with the use of LloydÕs interferometer. The mean idea is based on using the sample in two different positions in the same interferometer. The me