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Determination of chemical composition and its relationship with optical properties of Ti-N and Ti-V-N sputtered thin films

✍ Scribed by C. Wiemer; F. Lévy; F. Bussy

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 437 KB
Volume: 68-69
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)90157-0

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