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Determination of bulk discharge current in the dielectric film of MEMS capacitive switches

✍ Scribed by M.S. Koutsoureli; G.J. Papaioannou

Book ID
113800541
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
426 KB
Volume
51
Category
Article
ISSN
0026-2714

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πŸ“œ SIMILAR VOLUMES

Modeling of dielectric charging in RF ME
Modeling of dielectric charging in RF MEMS capacitive switches
✍ Prasad S. Sumant; Andreas C. Cangellaris; Narayana R. Aluru πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 242 KB

## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf