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Detailed numerical investigation of a DC sputter magnetron

✍ Scribed by Kolev, I.; Bogaerts, A.

Book ID: 120317839
Publisher: IEEE
Year: 2006
Tongue: English
Weight: 660 KB
Volume: 34
Category: Article
ISSN: 0093-3813
DOI: 10.1109/TPS.2006.875843

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