✦ LIBER ✦

Calculation of gas heating in a dc sputter magnetron

✍ Scribed by Kolev, I.; Bogaerts, A.

Book ID: 121694523
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 986 KB
Volume: 104
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2970166

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

3D numerical simulation of gas heating e

3D numerical simulation of gas heating effects in a magnetron sputter deposition system

✍ Ekpe, Samuel D; Dew, Steven K 📂 Article 📅 2006 🏛 Institute of Physics 🌐 English ⚖ 378 KB

Detailed numerical investigation of a DC

Detailed numerical investigation of a DC sputter magnetron

✍ Kolev, I.; Bogaerts, A. 📂 Article 📅 2006 🏛 IEEE 🌐 English ⚖ 660 KB

Gas condensation of ultrafine silicon pa

Gas condensation of ultrafine silicon particles using dc magnetron sputtering

✍ Pearson, D.H.; Edelstein, A.S. 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 762 KB

Characterization of a DC magnetron sputt

Characterization of a DC magnetron sputtering device

✍ Desideri, D.; Bagatin, M.; Spolaore, M.; Antoni, V.; Cavazzana, R.; Martines, E. 📂 Article 📅 2005 🏛 Emerald Group Publishing Limited 🌐 English ⚖ 300 KB

Design Assessments of a Refined DC Magne

Design Assessments of a Refined DC Magnetron Sputter With Multiple Magnetron Arrangements

✍ Cheng-Tsung Liu; Ming-Chih Lai; Chang-Chou Hwang 📂 Article 📅 2010 🏛 IEEE 🌐 English ⚖ 639 KB

UHV sputter deposition with a research-s

UHV sputter deposition with a research-scale DC magnetron

✍ Somekh, R E; Barber, Z H 📂 Article 📅 1988 🏛 Institute of Physics ⚖ 626 KB