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Model based investigation of Ar+ ion damage in DC magnetron sputtering

✍ Scribed by Siemers, Michael; Pflug, Andreas; Melzig, Thomas; Gehrke, Kai; Weimar, Andreas; Szyszka, Bernd

Book ID: 121276288
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 816 KB
Volume: 241
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.09.025

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