Variation of color in Zirconium nitride thin films prepared at high Ar flow rates with reactive dc magnetron sputtering

✍ Scribed by P. Klumdoung; A. Buranawong; S. Chaiyakun; P. Limsuwan

• Book ID: 119357493
• Publisher: Elsevier
• Year: 2012
• Tongue: English
• Weight: 477 KB
• Volume: 32
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2012.02.032