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Effect of Thickness on Microstructure, Electrical and Optical Properties of Zirconium Nitride Thin Film Prepared by DC Reactive Magnetron Sputtering at Room Temperature

โœ Scribed by Valaiauksornlikit, Mano; Rakreungdet, Worawarong; Horprathum, Mati; Eiamchai, Pitak; Patthanasettakul, Viyapol; Chindaudom, Pongpan


Book ID
121862163
Publisher
Trans Tech Publications, Ltd.
Year
2013
Tongue
English
Weight
953 KB
Volume
770
Category
Article
ISSN
1662-8958

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