𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Design of magnetrons for dc sputtering

✍ Scribed by JB Almeida

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
470 KB
Volume
39
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

DC reactive magnetron sputtered ZnO film
DC reactive magnetron sputtered ZnO films
✍ Tomonobu Hata; Toshiharu Minamikawa; Osamu Morimoto; Toshio Hada πŸ“‚ Article πŸ“… 1979 πŸ› Elsevier Science 🌐 English βš– 480 KB
Characterization of reactive DC magnetro
Characterization of reactive DC magnetron sputtered TiAlN thin films
✍ B. Subramanian; K. Ashok; P. Kuppusami; C. Sanjeeviraja; M. Jayachandran πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 180 KB

## Abstract Thin films of about 1ΞΌm Titanium Aluminum Nitride (TiAlN) were deposited onto mild steel substrates by reactive direct current (DC) magnetron sputtering using a target consisting of equal segments of titanium and aluminum. X‐ray diffraction (XRD) analysis showed that the TiAlN phase had