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Design study of an energy-variable RF-accelerator for ion implantation

✍ Scribed by J. Dehen; H. Deitinghoff; H. Klein; M. Sarstedt; A. Schempp; R. Thomae

Book ID: 113285233
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 432 KB
Volume: 89
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95144-6

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