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Design and fabrication of a micromachined gyroscope with high shock resistance

โœ Scribed by Jian Zhou, Tao Jiang, Ji-wei Jiao, Ming Wu


Book ID
120914966
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
875 KB
Volume
20
Category
Article
ISSN
0946-7076

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In this paper, a new micromachined interdigital coplanar waveguide (CPW) structure has been developed and its characteristics have been studied as a function of transmission line parameters. In interdigital CPW, the ground conductor is thickened by micromachining techniques which is helpful for redu