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Design and Simulation of a New Decoupled Micromachined Gyroscope

โœ Scribed by Sharaf, Abdelhameed; Sedky, Sherif; Habib, S E-D


Book ID
111986796
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
202 KB
Volume
34
Category
Article
ISSN
1742-6588

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In this paper, a new micromachined interdigital coplanar waveguide (CPW) structure has been developed and its characteristics have been studied as a function of transmission line parameters. In interdigital CPW, the ground conductor is thickened by micromachining techniques which is helpful for redu