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Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections

✍ Scribed by Bo Lv; Xuesong Liu; Zhenchuan Yang; Guizhen Yan


Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
667 KB
Volume
14
Category
Article
ISSN
0946-7076

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## Abstract In this report, we describe the fabrication of a chiral metamaterial based on a periodic array of Y‐shaped Al structures on a dielectric Mylar substrate. The unit cell dimensions of the Y‐structure are ∼100 μm on a side with 8 μm linewidths. The fabricated Y‐structure elements are chara