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Design and fabrication of a micromachined Coulter counter

โœ Scribed by Koch, M; Evans, A G R; Brunnschweiler, A


Book ID
121184678
Publisher
Institute of Physics
Year
1999
Tongue
English
Weight
237 KB
Volume
9
Category
Article
ISSN
0960-1317

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In this paper, a new micromachined interdigital coplanar waveguide (CPW) structure has been developed and its characteristics have been studied as a function of transmission line parameters. In interdigital CPW, the ground conductor is thickened by micromachining techniques which is helpful for redu